DCA manuals: Difference between revisions
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* [[DCA RF Atom Source]] | * [[DCA RF Atom Source]] | ||
* [[Bakeout System]] | * [[DCA Bakeout System]] | ||
* [[Substrate Manipulator]] | * [[DCA Substrate Manipulator]] | ||
* [[Beam Flux Monitor]] | * [[DCA Beam Flux Monitor]] | ||
* [[High Temperature Effusion Cell]] | * [[DCA High Temperature Effusion Cell]] | ||
* [[Low Temperature Effusion Cell]] | * [[DCA Low Temperature Effusion Cell]] | ||
* [[MOPI]] | * [[DCA MOPI]] | ||
--------- | --------- | ||
Motor Control Unit | Motor Control Unit | ||
* [[UHV Motorised Throttle Valve]] | * [[DCA UHV Motorised Throttle Valve]] | ||
* [[Substrate Manipulator Drive MCU-RS, PSU-Z]] | * [[DCA Substrate Manipulator Drive MCU-RS, PSU-Z]] | ||
* [[DCA_MCU-VA]] | * [[DCA_MCU-VA]] | ||