Cleanroom: Difference between revisions
Jump to navigation
Jump to search
| Line 7: | Line 7: | ||
|- | |- | ||
| [[Spinner]] || [[Spinner_procedure| Spinner]] | | [[Spinner]] || [[Spinner_procedure| Spinner]] | ||
|- | |||
| [[Hot plate ]] || | |||
|- | |- | ||
| [[Optical mask aligner]] || [[Optical mask aligner_procedure |Optical mask aligner]] | | [[Optical mask aligner]] || [[Optical mask aligner_procedure |Optical mask aligner]] | ||
Revision as of 17:36, 14 August 2025
Instruments
Manuals
| Manual | Procedure |
|---|---|
| Spinner | Spinner |
| Hot plate | |
| Optical mask aligner | Optical mask aligner |
| ion beam etching | Example |