Cleanroom
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Instruments[edit | edit source]
| Manual | Procedure |
|---|---|
| Spinner | Spinner |
| Hot plate | |
| Optical mask aligner | Optical mask aligner |
| Ion beam etching | Ion Beam etching |
Photoresist[edit | edit source]
Microposit S1800 - Positive Photoresit - Datasheet
Negative MA-N