Cleanroom: Difference between revisions
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=== Instruments === | === Instruments === | ||
{| class="wikitable" | {| class="wikitable" | ||
|- | |- | ||
! Manual !! Procedure | ! Manual !! Procedure | ||
| Line 16: | Line 14: | ||
=== Photoresist === | === Photoresist === | ||
[[Positive | [[Microposit S1800 - Positive Photoresit - Datasheet]] <br> | ||
[[Negative MA-N]] | [[Negative MA-N]] | ||
=== Developer === | === Developer === | ||
Latest revision as of 18:13, 14 August 2025
Instruments[edit | edit source]
| Manual | Procedure |
|---|---|
| Spinner | Spinner |
| Hot plate | |
| Optical mask aligner | Optical mask aligner |
| Ion beam etching | Ion Beam etching |
Photoresist[edit | edit source]
Microposit S1800 - Positive Photoresit - Datasheet
Negative MA-N