Cleanroom: Difference between revisions
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! Manual !! Procedure | ! Manual !! Procedure | ||
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| [[ | | [[Spinner]] || | ||
|- | |- | ||
| [Optical mask aligner]] || Example | | [Optical mask aligner]] || Example | ||
Revision as of 16:45, 14 August 2025
Instruments
Manuals
| Manual | Procedure |
|---|---|
| Spinner | |
| [Optical mask aligner]] | Example |
| ion beam etching | Example |