Cleanroom: Difference between revisions
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| Line 6: | Line 6: | ||
! Manual !! Procedure | ! Manual !! Procedure | ||
|- | |- | ||
| [[Spinner]] || | | [[Spinner]] || [[Spinner_procedure| Spinner]] | ||
|- | |- | ||
| [Optical mask aligner]] || Example | | [[Optical mask aligner]] || Example | ||
|- | |- | ||
| [[ion beam etching]] || Example | | [[ion beam etching]] || Example | ||
Revision as of 16:51, 14 August 2025
Instruments
Manuals
| Manual | Procedure |
|---|---|
| Spinner | Spinner |
| Optical mask aligner | Example |
| ion beam etching | Example |