Cleanroom: Difference between revisions
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=== Instruments === | === Instruments === | ||
[[Spinner]] | [[Spinner]] <br> | ||
[[Optical mask aligner]] | [[Optical mask aligner]] | ||
=== Photoresist === | === Photoresist === | ||
[[Positive S1800]] | [[Positive S1800]] <br> | ||
[[Negative MA-N]] | [[Negative MA-N]] | ||
=== Developer === | === Developer === | ||