Cleanroom: Difference between revisions
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=== Instruments === | === Instruments === | ||
[[ | Manuals | ||
{| class="wikitable" | |||
|+ Instruments | |||
|- | |||
! Manual !! Procedure | |||
|- | |||
| [[Spinner_manual]] || Example | |||
|- | |||
| [Optical mask aligner]] || Example | |||
|- | |||
| [[ion beam etching]] || Example | |||
|} | |||
=== Photoresist === | === Photoresist === | ||
Revision as of 16:44, 14 August 2025
Instruments
Manuals
| Manual | Procedure |
|---|---|
| Spinner_manual | Example |
| [Optical mask aligner]] | Example |
| ion beam etching | Example |