Cleanroom: Difference between revisions
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| Line 8: | Line 8: | ||
| [[Spinner]] || [[Spinner_procedure| Spinner]] | | [[Spinner]] || [[Spinner_procedure| Spinner]] | ||
|- | |- | ||
| [[Optical mask aligner]] || | | [[Optical mask aligner]] || [[Optical mask aligner_procedure |Optical mask aligner]] | ||
|- | |- | ||
| [[ion beam etching]] || Example | | [[ion beam etching]] || Example | ||
Revision as of 17:31, 14 August 2025
Instruments
Manuals
| Manual | Procedure |
|---|---|
| Spinner | Spinner |
| Optical mask aligner | Optical mask aligner |
| ion beam etching | Example |