Cleanroom: Difference between revisions
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| [[Optical mask aligner]] || [[Optical mask aligner_procedure |Optical mask aligner]] | | [[Optical mask aligner]] || [[Optical mask aligner_procedure |Optical mask aligner]] | ||
|- | |- | ||
| [[ | | [[Ion beam etching]] || [[Ion beam etching_procedure | Ion Beam etching]] | ||
|} | |} | ||
Revision as of 17:37, 14 August 2025
Instruments
Manuals
| Manual | Procedure |
|---|---|
| Spinner | Spinner |
| Hot plate | |
| Optical mask aligner | Optical mask aligner |
| Ion beam etching | Ion Beam etching |